Method and apparatus for passing charge from word lines...

Details Method and apparatus for passing charge from word lines... Method and apparatus for passing charge from word lines...

2007-01-30

2007-01-30

Lam, David (Department: 2827)

Static information storage and retrieval

Addressing

Particular decoder or driver circuit

C365S204000, C365S189090

Reexamination Certificate

active

11014258

ABSTRACT:
A plasma damage protection circuit includes a word line driver circuit with plasma damage protection features. If, during manufacture, plasma-based processes cause charge to build up on the word lines, the charge passes from the word lines through at least the word line drivers to the semiconductor substrate. Another plasma-based protection circuit includes a device coupled to multiple word line drivers. If, during manufacture, plasma-based processes cause charge to build up on the word lines, the charge passes from the word lines through at least the device to the semiconductor substrate. Thus, these plasma-based protection circuits save space while protecting the integrated circuit from plasma process-based damage.

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