Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1996-06-28
1998-05-05
Nelms, David C.
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
356338, 356340, 356343, 250572, G01N 2100
Patent
active
057483051
ABSTRACT:
A method for foreign particles inspection includes illuminating an inspection surface of an inspection object with a beam which is, one of s-polarized and p-polarized relative to the inspection surface of the inspection object. The illumination utilizes an optical axis which is generally parallel to the inspection surface or which intersects the inspection surface at an angle that is greater than or equal to 1.degree. and less than 5.degree.. Reflected and scattered light is detected utilizing an optical axis which makes an acute angle with the inspection surface and which makes a differential angle of 30.degree. or less with the optical axis of the illumination beam. The detection of foreign particles is accomplished by detecting the component of the reflected and scattered light which is the other of s-polarized and p-polarized relative to the inspection surface.
REFERENCES:
patent: 5331396 (1994-07-01), Yukawa et al.
patent: 5363187 (1994-11-01), Hagiwara et al.
Keisoku-jidoseigyo-gakkai, vol. 17, No. 2, pp. 237-242, issued Apr. 1981 by N. Akiyama et al. (Hitachi), entitled "Automtic Inspection of Foreign Particles on Patterned Sample by Means of Polarized Laser".
Keisoku-jidoseigyo-gakki, vol. 25, No. 9, pp. 954-961, issued 1989 by M. Koizumi et al. (Hitachi), entitled "Contaiminant Detection Method Utilizing Polarization Characteristics of Light Reflected from LSI Patterns".
Ito Masami
Nagasaki Tatsuo
Nishii Kanji
Shimono Ken
Takamoto Kenji
Matsushita Electric - Industrial Co., Ltd.
Nelms David C.
Ratliff Reginald A.
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