Method and apparatus for parameter difference imaging of a sampl

Details Method and apparatus for parameter difference imaging of a sampl Method and apparatus for parameter difference imaging of a sampl

1997-07-28

1999-08-31

Font, Frank G.

Optics: measuring and testing

By shade or color

With color transmitting filter

356432, 356 73, 356237, 355 53, G01N 2125, G01N 2100, G03B 2742

Patent

active

059461020

ABSTRACT:
Physical properties such as composition, purity, or doping level of a sample surface can be measured and imaged using the apparatus and method disclosed herein. Imaging is performed by the following steps:

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patent: 5439291 (1995-08-01), Reading
patent: 5490728 (1996-02-01), Schietinger et al.
patent: 5543919 (1996-08-01), Mumola

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