Method and apparatus for over pressure testing pressure sensitiv

Details Method and apparatus for over pressure testing pressure sensitiv Method and apparatus for over pressure testing pressure sensitiv

1996-03-29

1997-09-16

Brock, Michael

Measuring and testing

With fluid pressure

Dimension, shape, or size

G01M 302

Patent

active

056683057

ABSTRACT:
Individual pressure sensitive devices 183 fabricated on a wafer 182 are individually over pressure tested by hermetically securing the wafer 182 between a first plate 105 having individual chambers 135 coupled to an inlet 125 thereon, and second plate 110 having individual chambers coupled to an outlet 130 thereon. A predetermined vacuum generated by a compressor 115 coupled to the first plate 105 is applied to the individual pressure sensitive devices 183 on the wafer 182 for a predetermined duration. Subsequently, a predetermined vacuum generated by a vacuum generator 120 coupled to the outlet 130 is applied to the individual pressure sensitive devices 183 on the wafer 182 to remove disintegrated fragments of the individual pressure sensitive devices 183 on the wafer that fail the over pressure test to minimise contamination.

REFERENCES:
patent: 4733553 (1988-03-01), Folk et al.
patent: 4777716 (1988-10-01), Folk et al.
patent: 4825684 (1989-05-01), Nishiguchi et al.

Affiliated with

Also associated with

Rating

Method and apparatus for over pressure testing pressure sensitiv does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for over pressure testing pressure sensitiv, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for over pressure testing pressure sensitiv will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-219922