Method and apparatus for orienting semiconductor wafers in...

Details Method and apparatus for orienting semiconductor wafers in... Method and apparatus for orienting semiconductor wafers in...

2007-09-11

2007-09-11

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C356S399000

Reexamination Certificate

active

10816184

ABSTRACT:
Described are systems and methods for orienting a semiconductor wafer during semiconductor fabrication with the aid of an optical alignment system, the semiconductor wafer having an alignment mark with regular structures, on the basis of which the position of the semiconductor wafer can be determined.

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