Method and apparatus for orienting semiconductor wafers

Details Method and apparatus for orienting semiconductor wafers Method and apparatus for orienting semiconductor wafers

1983-07-25

1987-05-05

Spar, Robert J.

Material or article handling

Article rotator, roller type

414757, 414786, 198394, B65G 4724

Patent

active

046628118

ABSTRACT:
A method and apparatus for orienting semiconductor wafers of the type that have a generally circular peripheral shape and a flat, chordally extending edge on the periphery. In fabricating the wafers the chordally extending portion is formed in fixed relation to the crysatallographic axes of the material of which the wafer is formed. All subsequent processes are precisely orientated with respect to the chordally extending edge and the present invention affords orientation of such edge to virtually any position.

REFERENCES:
patent: 3297134 (1967-01-01), Pastuszak
patent: 3865254 (1975-02-01), Johannsmeier
patent: 3901183 (1975-08-01), Wittkower
patent: 3982627 (1976-09-01), Isohata
patent: 3997065 (1976-12-01), Jaksch
patent: 4311427 (1982-01-01), Coad et al.
patent: 4376482 (1983-03-01), Wheeler et al.
patent: 4441853 (1984-04-01), Kosugi
patent: 4449885 (1984-05-01), Hertel et al.
"Semiconductor Wafer Alignment Fixture", from IBM Technical Disclosure Bulletin, vol. 10, No. 6, p. 828, Nov. 1967.

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