Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Patent
1998-11-25
1999-11-23
Ro, Bentsu
Electricity: motive power systems
Positional servo systems
With particular 'error-detecting' means
108146, 414754, 414783, 414936, 414941, 294907, G05D 312
Patent
active
059906502
ABSTRACT:
A method and apparatus for orienting a disk to precisely align a fiducial mark on the disk relative to an external reference point while gripping the disk only along its circumferential edge.
REFERENCES:
patent: 5054991 (1991-10-01), Kato
patent: 5365672 (1994-11-01), Kato
patent: 5452078 (1995-09-01), Cheng
patent: 5520501 (1996-05-01), Kouno et al.
patent: 5825913 (1998-10-01), Rostami et al.
patent: 5905850 (1999-05-01), Kavch
Lumonics Corporation
Ro Bentsu
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