Optical waveguides – Integrated optical circuit
Patent
1997-12-19
2000-06-13
Lee, John D.
Optical waveguides
Integrated optical circuit
359245, G02B 612, G02F 1015
Patent
active
060759089
ABSTRACT:
An optical modulator that modulates light through the semiconductor substrate through the back side of a flip chip packaged integrated circuit. The optical modulator of the present invention enables integrated circuit signals to be extracted through the back side of the semiconductor substrate. In one embodiment, an optical modulator is disposed within a flip chip packaged integrated circuit die. The optical modulator includes a deflector and a diffraction grating. An infrared light beam is directed through the back side of a silicon substrate of the integrated circuit die, deflected off the deflector through the diffraction grating and back out the back side of the integrated circuit die. The diffraction grating modulates the phase of a portion of the deflected light beam in response to an integrated circuit signal. A resulting diffraction interference occurs between the phase modulated portions and non-phase modulated portions of the deflected light beam. The interference causes amplitude modulation of a zero order diffraction of the deflected light beam, from which the integrated circuit signal can be extracted.
REFERENCES:
patent: 4422088 (1983-12-01), Gfeller
patent: 4695120 (1987-09-01), Holder
patent: 4758092 (1988-07-01), Heinrich et al.
patent: 4761620 (1988-08-01), Bar-Joseph et al.
patent: 4865427 (1989-09-01), Kingston et al.
patent: 4871224 (1989-10-01), Karstensen et al.
patent: 4917450 (1990-04-01), Pocholle et al.
patent: 4939793 (1990-07-01), Stewart
patent: 4966430 (1990-10-01), Weidel
patent: 5061027 (1991-10-01), Richard
patent: 5153770 (1992-10-01), Harris
patent: 5159700 (1992-10-01), Reid et al.
patent: 5198684 (1993-03-01), Sudo
patent: 5400419 (1995-03-01), Heinen
patent: 5432630 (1995-07-01), Lebby et al.
patent: 5434434 (1995-07-01), Kasahara et al.
patent: 5485021 (1996-01-01), Abe
patent: 5502779 (1996-03-01), Magel
patent: 5568574 (1996-10-01), Tanguay, Jr. et al.
patent: 5605856 (1997-02-01), Goosen et al.
patent: 5625636 (1997-04-01), Bryan et al.
patent: 5625729 (1997-04-01), Brown
patent: 5629838 (1997-05-01), Knight et al.
patent: 5638469 (1997-06-01), Feldman et al.
patent: 5677783 (1997-10-01), Bloom et al.
patent: 5696862 (1997-12-01), Hauer et al.
patent: 5835646 (1998-11-01), Yoshimura et al.
patent: 5864642 (1999-01-01), Chun et al.
patent: 5872360 (1999-02-01), Paniccia et al.
Miller, DAB: "Reason and Prospects for Dense Optical Interconnections", Presentation by Stanford University Professor, (Oct. 1997).
Sakano, S. et al.: "InGaAsP/InP Monolithic Integrated Circuit with Lasers and an Optical Switch," Electronics Letters, 22(11), May 1986.
Mansuripur, M. and Goodman, JW: "Signal and Noise in Magneto-Optical Readout," J. Appl. Phys., 53(6), Jun. 1982.
Alping, A et al.: "Highly Efficient Waveguide Phase Modulator for Integrated Optoelectronics," Appl. Phys. Lett., 48(19), May 1986.
Levitan, SP et al.: "Computer-Aided Design of Free-Space Opto-Electronic Systems," DAC 97, Anaheim, California (1997) No Month Avail.
Goodman, JW et al.: "Optical Interconnetions for VLSI Systems," Proc. IEEE, 72(7), Jul. 1984.
Wang, C. et al.: "Ultrafast, All-Silicon Light Modulator," Optics Letters, 19(18), Sep. 1994.
Tada, K. and Okada, Y: "Bipolar Transistor Carrier-Injected Optical Modulator/Switch: Proposal and Analysis," IEEE Electr Dev Ltrs, 7(11), Nov. 1986.
Fernando, C. et al: "Si/Si.sub.o.85 /Ge.sub.o.15 /Si P-I-N Waveguide Optical Intensity Modulator," SPIE, vol. 2402(131), 1995 No Month Available.
"Optoelectronic VLSI Foundry Services From Lucent Technologies", Lucent Technologies Bell Labs Innovations Web Page at http://www.bell-labs.com/project/oevlsi/, updated Mar. 2, 1997.
"Process for Fabricating OE/VLSI Chips", Lucent Technologies Bell Labs Innovations Web Page at http://www.bell-labs.com/project/oevlsi/wfabproc.html, updated Sep. 26, 1996.
"Detailed Design Rules for Workshop Chips", Lucent Technologies Bell Labs Innovations Web Page at http://www.bell-labs.com/project/oevlsi/wdesrule.html, updated Mar. 7, 1997.
Orobtchouk, R., et al.: "Quasi-TEoo Singlemode Optical Waveguides for Electro-optical Modulation at 1.3 .mu.m Using Standard SIMOX Material" in IEEE Proc. Optoelectron, vol. 144(2) Apr. 1997.
Soref, RA: "Electrooptical Effects of Silicon" in IEEE J of Quantum Electron. vol. QE-23(1), Jan. 1997.
Cutolo, A., et al.: "An Electrically Controlled Bragg Reflector Integrated in a Rib Silicon on Insulator Waveguide" in Appl. Phys. Lett. vol. 71(2), Jul. 1997.
Raybon, G., et al.: "A Reconfigurable Optoelectronic Wavelength Converter based on an Integrated Electroabsorption Modulated Laser Array" in 1997 Digest of the IEEE/LEOS Summer Topical Meetings, Montreal, Quebec, Canada, Aug. 1997.
Reiley, DJ, and Sasian JM: "Optical Design of a Free-Space Photonic Switching System" in Applied Optics, vol. 36(19), Jul. 1997.
Cutolo, A., et al.: Silicon Electro-Optic Modulator Based on a Three Terminal Device Integrated in a Low-Loss Single-Mode SOI Waveguide in J. of Lightwave Technology, vol. 15(3), Mar. 1997.
Koren, U., et al.: "A Polarization Insensitive Semiconductor Optical Amplifier with Integrated Electroabsorption Modulators" in Integrated Photonics Research, Apr. 29-May 2, 1996 Technical Digest Series, vol. 6, 1996.
Krishnamoorthy, AV, and Miller, DABM: "Free-Space Optical Interconnections for VLSI Systems: A Technology Roadmap", Conference Proceedings Leos '96 9th Annual MeetingU IEEE Lasers and Electro-Optics (vol. 1), Nov. 1996.
Goosen, KW: "GaAs MQW Modulators Integrated With Silicon CMOS" in IEEE Photonics Technology Letters, vol. 7(4), Apr. 1995.
Kuwamura, Y, et al.: "Analysis of Operating Mechanism in Semiconductor Optical Modulator with Electron-Depleting Absorption Control" in Electronics and Communications in Japan, vo. 79(5), Dec. 1995.
Liu, MY and Chou, SY: "High-Modulation-Depth and Short-Cavity-Length Silicon Fabry-Perot Modulator with Two Grating Bragg Reflectors" in Appl. Phys. Lett. vol. 68(2), Jan. 1996.
Heinrich, HK: "A Noninvasive Optical Probe for Detecting Electrical Signals in Silicon Integrated Circuits", Doctoral Dissertation, Stanford Univ., (Apr., 1987).
Paniccia Mario J.
Rao Valluri R. M.
Young Ian A.
Intel Corporation
Lee John D.
Stahl Michael J.
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