Method and apparatus for optically measuring clearance change

Details Method and apparatus for optically measuring clearance change Method and apparatus for optically measuring clearance change

1983-10-07

1986-12-30

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, G01B 902

Patent

active

046325565

ABSTRACT:
A clearance formed between two members is measured by optical means projecting a light beam on the respective members and utilizing lights reflected therefrom.
The reflected lights from the two members are passed through means capable of regulating an optical length and polarization means, whereupon they are caused to interfere. The irradiance of the interference light is converted into an electric signal. The electric signal is applied to a control circuit, and is fed back to the means capable of regulating an optical length so that the optical-path difference of the reflected lights may be held constant. The change of the clearance between the two members is found by measuring the factor of the feedback.

REFERENCES:
patent: 3632214 (1972-01-01), Chang et al.
patent: 3796495 (1974-03-01), Laub
patent: 4180328 (1979-12-01), Drain
patent: 4196977 (1980-04-01), Scibor-Rylski
patent: 4298283 (1981-11-01), Makosch et al.
patent: 4358201 (1982-11-01), Makosch

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