Method and apparatus for optically analyzing a surface

Details Method and apparatus for optically analyzing a surface Method and apparatus for optically analyzing a surface

2005-10-26

2008-08-05

Chowdhury, Tarifur R (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C702S075000, C702S079000, C356S450000

Reexamination Certificate

active

07408649

ABSTRACT:
Apparatus and methods are provided for analyzing surface characteristics of a test object using broadband scanning interferometry. Test objects amenable to these apparatus and methods include but are not limited to semiconductor wafers, semiconductor devices, metallic surfaces, and the like. An interferometry system is used to obtain an interferometry signal and related to data embodied in the signal representative of the test object surface. This signal and/or data is used to construct an n-dimensional function that includes an independent frequency variable and an independent time variable, and/or an n-dimensional function that includes an independent scale variable and an independent time variable, and/or a multi-domain function. These functions are compared with various models to obtain a best match that is then used to characterize the test object surface.

REFERENCES:
patent: 5398113 (1995-03-01), de Groot
patent: 6545763 (2003-04-01), Kim et al.
patent: 7102761 (2006-09-01), De Lega et al.
patent: 7106454 (2006-09-01), De Groot et al.
patent: 7139081 (2006-11-01), De Groot
patent: 2004/0189999 (2004-09-01), De Groot
patent: 2005/0012928 (2005-01-01), Sezginer et al.
patent: 2005/0057757 (2005-03-01), De Lega
patent: 2005/0068540 (2005-03-01), De Groot
patent: 2005/0073692 (2005-04-01), De Groot
patent: 2005/0078318 (2005-04-01), De Groot
patent: 2005/0078319 (2005-04-01), De Groot
patent: 2005/0088663 (2005-04-01), De Groot
patent: 2006/0262321 (2006-11-01), De Groot
patent: 2007/0046953 (2007-03-01), De Groot
patent: 2007/0081167 (2007-04-01), De Groot
patent: 2007/0097380 (2007-05-01), De Groot
Determination of fringe order in white-light interference microscopy, Applied Optics, Aug. 1, 2002.
Signal Analysis, IEEE Press, Wiley-Interscience.
The Handbook of Formulas and Tables for Signal Processing, Alexander Poularikas, CRC Press, IEEE Press.
Optical Shop Testing, 2ndedition, Daniel Malacara, Wiley-Interscience.
Principles of Optics, Max Born et al., 7thexpanded edition, Cambridge University Press.
Thin Film Optical Filters, 3rdedition, H.A. Macleod, Institute of Physics Publishing, Bristol and Philadelphia.
Contributions to Interference Microscopy, Wolfgang Krug et al.
Mirau Correlation Microscope, Gordon Kino et al., Applied Optics, Sep. 10, 1990, vol. 29, No. 26.
Profilometry with a Coherence Scanning Microscope, Byron Lee et al., Applied Optics, Sep. 10, 1990, vol. 29, No. 26.
Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary grating, M.G. Moharam et al., Optical Society of America, 1995, vol. 12, No. 5.
Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings; enhance transmittance matrix approach, M.G. Moharam et al., Optical Society of America, vol. 12, No. 5, May 1995.
On the Use of Windows for Harmonic Analysis with the Discrete Fourier Transform, Fredric Harris, Proceedings of the IEEE, vol. 66, No. 1, Jan. 1978.

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