Method and apparatus for optically analyzing a surface

Details Method and apparatus for optically analyzing a surface Method and apparatus for optically analyzing a surface

2008-09-23

2008-09-23

Chowdhury, Tarifur R (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S450000, C702S159000

Reexamination Certificate

active

11373862

ABSTRACT:
A method and apparatus for analyzing a surface of a test object employs apparatus with a scanning interferometry system which generates a windowed interferometric signal from the surface of a test object to characterize the surface of the test object.

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