Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1995-10-31
1997-12-16
Evans, F. L.
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
G01N 2188
Patent
active
056991533
ABSTRACT:
The present invention provides an inspecting method and an apparatus therefor. A light illuminates an object to be inspected having optical diffusive characteristics such as a ceramics plate. A part of the light diffuses in the object from an illumination area is reflected at or passes through a defect such as a crack and reaches an imaging area. An image sensor detects the image of the imaging area. A signal showing a larger change is processed thereby to inspect the defect. The object is displaced stepwise relative to the light source and the image sensor. Thus, a crack or the like in an object can be inspected with high accuracy and at a high speed.
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Fukui Atsushi
Ito Masami
Nishii Kanji
Takamoto Kenji
Evans F. L.
Matsushita Electric - Industrial Co., Ltd.
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