Method and apparatus for optical film measurements in a...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition

Reexamination Certificate

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C451S006000, C356S237200

Reexamination Certificate

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06967715

ABSTRACT:
An optical probe (and method) for measuring a surface in an environment containing a first substance, includes a light source for transmitting a light onto an area of the surface to obtain a measurement, a source of the first substance including one of a fluid and a gas for displacing a second substance from an area of the surface receiving the light, and a measuring device for receiving the light being reflected from the surface and for determining a measurement of the surface based upon the reflected light.

REFERENCES:
patent: 5637029 (1997-06-01), Lehane
patent: 6319093 (2001-11-01), Lebel et al.

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