Image analysis – Applications – Manufacturing or product inspection
Patent
1998-10-09
1999-09-14
Couso, Jose L.
Image analysis
Applications
Manufacturing or product inspection
395 13, 250560, G06K 900, G06F 1518, G01N 2186
Patent
active
059534460
ABSTRACT:
An optical inspection device generates a plurality of measured optical data from inspection of a thin film stack. A processor evolves models of theoretical data, which are compared to the measured data, and a "best fit" solution is provided as the result. Each model of theoretical data is represented by an underlying "genotype" which is an ordered list of "genes." Each gene corresponds to a selected thin film parameter of interest. Many such individual genotypes are created thereby forming a "population" of genotypes, which are evolved through the use of a genetic algorithm. Each genotype has a fitness associated therewith based on how much the theoretical data derived therefrom differs from the measured data. Individual genotypes are selected based on fitness, then a genetic operation is performed on the selected genotypes to produce new genotypes. Multiple generations of genotypes are evolved until an acceptable solution is obtained.
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Opsal Jon
Sidorowich John J.
Couso Jose L.
Dang Duy M.
Therma-Wave, Inc.
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