Method and apparatus for operating a scanning microscope

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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324158D, 250310, G01R 3109, G01R 3102

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active

049029665

ABSTRACT:
A scanning microscope scans over the surface of a specimen to be tested in point-by-point fashion with a probe. The scan rate of the probe is controlled as dependent on a secondary electrical signal derived from the measuring point of the specimen surface and, thus, serves as a control signal to the output signal of a signal processing unit which is evaluated at a window discriminator or comparator. The output signal is supplied to a voltage controlled oscillator of the scan generator through an adjustable timer element. Simultaneously, the evaluated output signal is used for modulating the intensity of the write beam of a display means for controlling the intensity of the probe.

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