Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1986-08-27
1989-03-14
Karlsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 73R, G01R 3128, G01R 3126
Patent
active
048127485
ABSTRACT:
A scanning microscope scans over the surface of a specimen to be tested in point-by-point fashion with a probe. The scan rate of the probe is controlled as dependent on a secondary electrical signal derived from the measuring point of the specimen surface and, thus, serves as a control signal to the output signal of a signal processing unit which is evaluated at a window discriminator or comparator. The output signal is supplied to a voltage controlled oscillator of the scan generator through an adjustable timer element. Simultaneously, the evaluated output signal is used for modulating the intensity of the write beam of a display for controlling the intensity of the probe.
REFERENCES:
patent: 4108358 (1978-08-01), Niemaszyk et al.
patent: 4169244 (1979-09-01), Plows
patent: 4335457 (1982-06-01), Early
Nagase, M; "A Device Analysis . . ."; Microelectron Rel.; vol. 20; pp. 717-735; Feb. 1980.
V. Wilke, "Laser Scanning in Microscopy", Proc. of the Intl. Soc. for Optical Eng., (Apr. 19-20, 1983) pp. 164-172.
R. Muuller, "Scanning Laser Microscope for Inspection of . . ." Bd. 13, No. 1, Siemens Forsch. -u. Entwickl. (1984) pp. 9-14.
Brust Hans-Detlef
Otto Johann
Karlsen Ernest F.
Siemens Aktiengesellschaft
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