Method and apparatus for on-wafer testing of an individual...

Details Method and apparatus for on-wafer testing of an individual... Method and apparatus for on-wafer testing of an individual...

2005-06-21

2005-06-21

Ullah, Akm Enayet (Department: 2874)

Optical waveguides

Optical fiber waveguide with cladding

Utilizing nonsolid core or cladding

C385S123000

Reexamination Certificate

active

06909830

ABSTRACT:
A method for testing an optical chip, while the optical chip is still on a wafer, utilizing an optical probe, includes the steps of creating an access point on the wafer adjacent the optical chip. Inserting a probe at the access point to optically couple the optical probe and optical chip. The optical probe includes at least a first optical waveguide for changing the direction of input light at the probe to optically couple with the optical chip at the access point.

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