Method and apparatus for obtaining two-dimensional energy image,

Details Method and apparatus for obtaining two-dimensional energy image, Method and apparatus for obtaining two-dimensional energy image,

1992-02-18

1993-07-27

Dzierzynski, Paul M.

Radiant energy

Electron energy analysis

250310, H01J 3726

Patent

active

052312879

ABSTRACT:
A scanning Auger spectrometer using a cylindrical mirror analyzer. This analyzer is set to a given value Eo. A deviation .DELTA.E of the energy actually measured by the analyzer from the set value Eo occurs. The relation of the deviation .DELTA.E to the coordinates of each analyzed point is measured. During the measurements, the set energy is shifted in response to the position hit by the electron beam according to information obtained from the measurements in such a way that the deviation does not take place.

REFERENCES:
patent: 3631238 (1971-12-01), MacDonald
patent: 3909610 (1975-09-01), Kokubo
patent: 4034220 (1977-07-01), le Gressus et al.
patent: 4459482 (1984-07-01), Bales
N. C. MacDonald and J. R. Waldrop, Applied Physics Letters, vol. 19, No. 9, Nov. 1991, pp. 315-318.

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