Radiant energy – Electron energy analysis
Reexamination Certificate
2005-02-15
2005-02-15
Lee, John R. (Department: 2881)
Radiant energy
Electron energy analysis
C250S310000, C250S311000
Reexamination Certificate
active
06855927
ABSTRACT:
There are provided an element distribution observing method and an element distribution observing apparatus under utilization of core-loss electrons capable of restricting artifact caused by either a thickness or density of a specimen, or an occurrence of the artifact caused by a diffraction contrast. Electron beam intensities in a total three different energy-loss areas of two energy-loss areas not containing any core-loss electrons and one energy-loss area are calculated to attain an element distribution on the basis of the corresponding three energy-loss areas and an electron beam intensity.
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Isakozawa Shigeto
Kaji Kazutoshi
Taniguchi Yoshifumi
Ueki Yasumitsu
Hitachi High-Technologies Corporation
Leybourne James J.
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