Method and apparatus for numerically controlled probing

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36447436, G06F 1900

Patent

active

057966192

ABSTRACT:
A probing system used for determining a measured set of dimensions of at least one feature of an object. The system comprises an input device that receives an ideal set of dimension of the at least one feature. The input device generates a first signal indicative of an amount and location of sample measurements taken of the at least one feature. The system also comprises a probe device, which is electrically connected to the input device. The probe device receives the first signal from the input device, and in response directs a probe to the location of the measurements to be taken for each of the amount of sample measurements indicated. The probe device outputs a second signal indicative of a measured location for each of the amount of samples taken. The system further comprises a processor electrically connected to the probe device. The processor receives the second signal indicative of the measured locations of each of the samples taken, and rotates the measured locations about a single sample so all samples can be represented as a point lying on a two dimensional plane. Further, the processor uses the rotated samples to calculate a set of rotated dimensions, and then counter-rotates the rotated dimensions back to the positions of the measured locations to determine the measured set of dimensions of the feature.

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