Method and apparatus for nondestructive sample inspection

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Distributive type parameters

Reexamination Certificate

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C324S763010, C324S765010

Reexamination Certificate

active

10920723

ABSTRACT:
An apparatus for inspecting a sample for defects includes a signal generator for generating a signal and a device for splitting the signal into two separate signals which have substantially equal phase and magnitude. A sensor radiates the two signals on the sample and receives the two signals reflected from the sample. A device is provided for determining a difference between the two signals reflected from the sample without unwanted influence of variations of distance between the sensor and sample, and reflections from nearby sample edges and boundaries. A defect is determined to exist when a difference is found between the two reflected signals.

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