Method and apparatus for nondestructive measurement and...

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Distributive type parameters

Reexamination Certificate

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Reexamination Certificate

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07109724

ABSTRACT:
An apparatus for contactless measurement of sheet charge density and mobility includes a microwave source, waveguide, first, second and third detectors, and an eccentric bore mount for adjusting the sample. A circular waveguide, carrying the TE11mode, terminates by the sample behind which a short is located. A magnetic field is applied perpendicular to the plane of the sample, and an incident TE11wave causes an ordinary reflected wave and a reflected wave caused by the Hall effect. A first detector measures the ordinary reflected wave, which has the same polarization as the incident wave. A seperate probe measures the reflected wave caused by the Hall effect, whose polarization is perpendicular to the former. This reflected wave is detected, and the output combined with an attenuated; phase shifted, portion of the forward power at a single detector, to eliminate by destructive interference any spurious incident signal at said detector.

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PCT/US05/28254, PCT Search Report dated Dec. 5, 2005.

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