Optics: measuring and testing – Shape or surface configuration – Triangulation
Reexamination Certificate
2007-10-23
2007-10-23
Nguyen, Sang H. (Department: 2886)
Optics: measuring and testing
Shape or surface configuration
Triangulation
C356S619000, C356S604000, C250S559220, C382S286000
Reexamination Certificate
active
10805435
ABSTRACT:
A non-contact three-dimensional surface measurement method is provided in which a grating pattern projected onto an object being measured, while the phase of the pattern is being shifted, is observed in a different direction from a projection direction to analyze the contrast of a grating image deformed in accordance with the shape of the object and thereby obtain the shape thereof. The method enables measurement of a three-dimensional shape over a large measurement range in a short time in a non-contact manner by successively shifting the focus on the projection and the imaging sides to enlarge the measurement range in the direction of depth.
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