Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate
2005-11-01
2005-11-01
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Dimension
Thickness
C324S754120, C324S230000
Reexamination Certificate
active
06961133
ABSTRACT:
The present invention provides a method and apparatus for use in measuring a thickness of a layer and/or variations in layer thickness for layers that are flat, curved or have curves. The apparatus comprises a light source to generate a light beam, a light beam detector to detect at least a portion of the light beam reflected, an eddy current field generator that induces an eddy current, an eddy current detector to detect the induced eddy current and a processor coupled with the light source, light detector, eddy current field generator and eddy current detector, wherein the processor controls the light detector, eddy current field generator and eddy current detector. A radial characteristic of a region of the surface can be determined, a scaling factor can be determined based on the radial characteristic and a measured distance can be scaled based on the scaling factor in determining a thickness.
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PCT/US2004/028028. International Search Report. Apr. 1, 2005.
Caton Lindsey M.
Sergoyan Edward G.
Fitch Even Tabin & Flannery
Lebens Thomas F.
Nguyen Sang H.
The Boeing Company
Toatley , Jr. Gregory J.
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