Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate
2006-05-23
2006-05-23
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
Dimension
Thickness
C382S141000, C382S145000, C706S013000
Reexamination Certificate
active
07050179
ABSTRACT:
An optical measuring device generates a plurality of measured optical data from inspection of a thin film stack. The measured optical data group naturally into several domains. In turn the thin film parameters associated with the data fall into two categories: local and global. Local “genes” represent parameters that are associated with only one domain, while global genes represent parameters that are associated with multiple domains. A processor evolves models for the data associated with each domain, which models are compared to the measured data, and a “best fit” solution is provided as the result. Each model of theoretical data is represented by an underlying “genotype” which is an ordered set of the genes. For each domain a “population” of genotypes is evolved through the use of a genetic algorithm. The global genes are allowed to “migrate” among multiple domains during the evolution process. Each genotype has a fitness associated therewith based on how much the theoretical data predicted by the genotype differs from the measured data. During the evolution process, individual genotypes are selected based on fitness, then a genetic operation is performed on the selected genotypes to produce new genotypes. Multiple generations of genotypes are evolved until an acceptable solution is obtained or other termination criterion is satisfied.
REFERENCES:
patent: 4652757 (1987-03-01), Carver
patent: 4999014 (1991-03-01), Gold et al.
patent: 4999509 (1991-03-01), Wada et al.
patent: 5148513 (1992-09-01), Koza et al.
patent: 5159412 (1992-10-01), Willenborg et al.
patent: 5222192 (1993-06-01), Shaefer
patent: 5249259 (1993-09-01), Harvey
patent: 5255345 (1993-10-01), Shaefer
patent: 5343554 (1994-08-01), Koza et al.
patent: 5394509 (1995-02-01), Winston
patent: 5434796 (1995-07-01), Weininger
patent: 5493401 (1996-02-01), Horie et al.
patent: 5541848 (1996-07-01), McCormack
patent: 5568590 (1996-10-01), Tolson
patent: 5581657 (1996-12-01), Lyon
patent: 5586218 (1996-12-01), Allen
patent: 5651099 (1997-07-01), Konsella
patent: 5694474 (1997-12-01), Ngo et al.
patent: 5864633 (1999-01-01), Opsal et al.
patent: 5896294 (1999-04-01), Chow et al.
patent: 5926773 (1999-07-01), Wagner
patent: 5953446 (1999-09-01), Opsal et al.
patent: 6268916 (2001-07-01), Lee et al.
patent: 6532076 (2003-03-01), Sidorowich
R.A. Sequeira et al., “Automating the parameterization of mathematical models using genetic algorithms,”Computer and Electronics in Agriculture, 1994, vol. 11, pp. 265-290.
E. Michielssen et al., “Optimal multilayer filter design using real coded genetic algorithms,”IEE Proceedings-J, Dec. 1992, vol. 139, No. 6, pp. 413-420.
T. Eisenhammer et al., “Optimization of interference filters with genetic algorithms applied to silver-based heat mirrors,”Applied Optics, Nov. 1, 1993, vol. 32, No. 31, pp. 6310-6315.
S. Martin et al., “Simulated Darwinian evolution of homogeneous multilayer systems: a new method for optical coatings design,”Optics Communications, Sep. 1, 1994, vol. 110, No. 5/6, pp. 503-506.
K. Rabinovitch et al., “Genetic algorithm and thin-film design,”Proceedings SPIE, Jul. 1994, vol. 2262, pp. 163-174.
S. Martin et al., “Synthesis of optical multilayer systems using genetic algorithms,”Applied Optics, May 1, 1995, vol. 34, No. 13, pp. 2247-2254.
T. Bäck et al., “Evolution Strategies for Mixed-Integer Optimization of Optical Multilayer Systems,”Proceedings Fourth Annual Conference on Evolutionary Programming, 1995, pp. 33-51.
D.J. Mikulin et al., “Fitting reflectivity data from liquid crystal cells using genetic algorithms,”Liquid Crystals, 1997, vol. 22, No. 3, pp. 301-307.
M. Mitchell, “Genetic Algorithms: An Overview,”Complexity, 1995, vol. 1, No. 1, pp. 31-39.
J.R. Koza, “Introduction to Genetic Algorithms,” fromGenetic Programming, Chapter 3, pp. 17-22 and 29.
J.H. Holland, “Genetic Algorithms,”Scientific American, Jul. 1992, pp. 66-72.
R.L. Riolo, “Survival of the Fittest Bits,”Scientific American, Jul. 1992, pp. 114-116.
J.T. Fanton et al., “Multiparameter measurements of thin films using beam-profile reflectometry,”J. Appl. Phys., Jun. 1, 1993, vol. 73, No. 11, pp. 7035-7040.
J.M. Leng et al., “Simultaneous measurement of six layers in a silicon on insulator film stack using spectrophotometry and beam profile reflectometry,”J. Appl. Phys., Apr. 15, 1997, vol. 81, No. 8, pp. 3570-3578.
E.A. Rietman et al., “A Genetic Algorithm for Low Variance Control in Semiconductor Device Manufacturing: Some Early Results,”IEEE Transactions on Semiconductor Manufacturing, May 1996, vol. 9, No. 2, pp. 223-229.
J.F. Tang et al., “Automatic design and optical thin-film systems—merit function and numerical optimization method,”J. Opt. Soc. Am., Nov. 1982, vol. 72, No. 11, pp. 1522-1528.
Lauchman Layla G.
Nguyen Sang H.
Stallman & Pollock LLP
Therma-Wave, Inc.
LandOfFree
Method and apparatus for multidomain data analysis does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for multidomain data analysis, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for multidomain data analysis will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3607596