Method and apparatus for monitoring via's in a semiconductor...

Details Method and apparatus for monitoring via's in a semiconductor... Method and apparatus for monitoring via's in a semiconductor...

2011-02-24

2011-12-06

Nguyen, Vinh (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S750300

Reexamination Certificate

active

08072233

ABSTRACT:
A method for monitoring a semiconductor fabrication process creates a wafer of semiconductor chips. Each chip has a one or more diodes. Each diode is addressable as part of an array, corresponds to a physical location of the chip, and is connected in series to a stack. The stack is composed of one ore more vertical interconnects and metal contacts. The diode and associated stack of vertical interconnects is addressed, and the current through each of the stacks of vertical interconnects in an array is measured.

REFERENCES:
patent: 4719411 (1988-01-01), Buehler
patent: 4829238 (1989-05-01), Goulette et al.
patent: 5627779 (1997-05-01), Odake et al.
patent: 5757884 (1998-05-01), Alexandrescu
patent: 6483368 (2002-11-01), Mayer et al.
patent: 6503765 (2003-01-01), Chao et al.
patent: 6856161 (2005-02-01), Thewes
patent: 7307338 (2007-12-01), Mandell et al.
patent: 7335603 (2008-02-01), Mancevski
patent: 2002/0089345 (2002-07-01), Doong et al.
patent: 2006/0245235 (2006-11-01), Krieger
patent: 0239251 (1987-02-01), None
patent: 0448263 (1991-03-01), None
International PCT Search Report and Written Opinion, PCT/US2008/067595, 13 pages, Sep. 30, 2008.

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