Method and apparatus for monitoring thermal processing of a work

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters

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324662, 324667, 21912402, 340584, 374184, G01R 2726, B23K 2600

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active

056940467

ABSTRACT:
A method and apparatus for monitoring thermal processing of a workpiece using a sensor electrode which can be positioned relative to the workpiece and to which an alternating electric signal is applied in order to determine a measured capacitance (C.sub.meas) present between the sensor electrode and workpiece by evaluating a change in the alternating signal as a consequence of the measured capacitance (C.sub.meas). A measured capacitance frequency distribution is formed from a number of determined measured capacitances (C.sub.meas). The measured distribution is compared with a reference distribution. If a deviation is present between the two distributions, process parameters can be appropriately readjusted. It is preferable to use a laser beam for processing the workpiece.

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