Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Patent
1995-11-27
1997-12-02
Karlsen, Ernest F.
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
324662, 324667, 21912402, 340584, 374184, G01R 2726, B23K 2600
Patent
active
056940467
ABSTRACT:
A method and apparatus for monitoring thermal processing of a workpiece using a sensor electrode which can be positioned relative to the workpiece and to which an alternating electric signal is applied in order to determine a measured capacitance (C.sub.meas) present between the sensor electrode and workpiece by evaluating a change in the alternating signal as a consequence of the measured capacitance (C.sub.meas). A measured capacitance frequency distribution is formed from a number of determined measured capacitances (C.sub.meas). The measured distribution is compared with a reference distribution. If a deviation is present between the two distributions, process parameters can be appropriately readjusted. It is preferable to use a laser beam for processing the workpiece.
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Hillerich Bernd
Jagiella Manfred
Do Diep
Karlsen Ernest F.
Precitec GmbH
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