Method and apparatus for monitoring the working of a workpiece w

Details Method and apparatus for monitoring the working of a workpiece w Method and apparatus for monitoring the working of a workpiece w

1991-04-19

1992-12-22

Albritton, C. L.

Electric heating

Metal heating

By arc

21912176, B23K 2602

Patent

active

051735849

ABSTRACT:
For monitoring the working of a workpiece (W) with pulsed radiation of an excimer laser the workpiece surface is periodically illuminated with visible light (B) synchronously with at least some of the laser pulses. A mirror arrangement (S) separates visible light from ultraviolet laser light so that an image corresponding to the working operation can be picked up with a video camera (VK).

REFERENCES:
patent: 4733047 (1988-03-01), Cruickshank et al.
patent: 4734550 (1988-03-01), Imamura et al.
patent: 4873413 (1989-10-01), Uesugi et al.
patent: 4918284 (1990-04-01), Weisz
patent: 4952770 (1990-08-01), Hayashi
patent: 5017755 (1991-05-01), Yahagi et al.

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