Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1988-11-21
1990-07-31
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
356445, G01N 2186
Patent
active
049452541
ABSTRACT:
A method of monitoring surface layer growth using light scattered off a surface illuminated e.g. by a laser. A small area of a surface of a substrate is illuminated and the light scattered in a non-specular direction is detected during cleaning and subsequent layer growth. The amount of light scattered varies strongly with surface characteristics and gives clear indication of the end of oxide removal, initiation of nucleation and quality of growing layers. The monitoring is used during e.g. chemical vapor deposition, or e.g. molecular beam epitaxy growth processes.
REFERENCES:
patent: 2892490 (1959-06-01), Shakesby
patent: 3492491 (1970-01-01), Beeh
patent: 3700903 (1972-10-01), Adler
patent: 3853093 (1974-12-01), Baker et al.
patent: 4039370 (1977-08-01), Kleinknecht
patent: 4091060 (1978-03-01), Carter et al.
patent: 4142107 (1979-02-01), Harakis
patent: 4198261 (1980-04-01), Busta et al.
patent: 4201474 (1980-05-01), Holl
patent: 4332833 (1982-06-01), Aspnes et al.
patent: 4420826 (1983-12-01), Marshall, Jr. et al.
Hsia Sherrie
Nelms David C.
The Secretary of State for Defence in Her Britannic Majesty's Go
LandOfFree
Method and apparatus for monitoring surface layer growth does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for monitoring surface layer growth, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for monitoring surface layer growth will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1400013