Electrical computers and digital processing systems: multicomput – Computer-to-computer protocol implementing – Computer-to-computer data transfer regulating
Reexamination Certificate
2007-04-03
2007-04-03
Wiley, David (Department: 2143)
Electrical computers and digital processing systems: multicomput
Computer-to-computer protocol implementing
Computer-to-computer data transfer regulating
C702S057000
Reexamination Certificate
active
09935213
ABSTRACT:
An aspect of the present invention includes a method and device for listening to communications between processes and tools, recording report and report trigger definitions, matching reports from tools with the recorded definitions, and translating messages into a context-insensitive format. Other aspects of the present invention include dynamically enhancing tool status reports, migrating processes form tool control hosts to distributed processors, and screening requests for tool status information from hosts and distributed processors. More detailed descriptions of aspects of the present invention are described in the claims, specification and drawings.
REFERENCES:
patent: 5307463 (1994-04-01), Hyatt et al.
patent: 5657252 (1997-08-01), George
patent: 5805442 (1998-09-01), Crater et al.
patent: 6233613 (2001-05-01), Walker et al.
patent: 6282576 (2001-08-01), Lane
patent: 6300787 (2001-10-01), Shaeffer et al.
patent: 6505256 (2003-01-01), York
patent: 6591310 (2003-07-01), Johnson
patent: 6604010 (2003-08-01), Lyoo et al.
patent: 6650955 (2003-11-01), Sonderman et al.
patent: 6711731 (2004-03-01), Weiss
patent: 6757681 (2004-06-01), Bertram et al.
patent: 6757714 (2004-06-01), Hansen
patent: 6826439 (2004-11-01), Barber et al.
patent: 6871112 (2005-03-01), Coss et al.
patent: 6907008 (2005-06-01), Moskovich et al.
patent: 6970758 (2005-11-01), Shi et al.
patent: 7003367 (2006-02-01), Cheng et al.
patent: 7072985 (2006-07-01), Lev-Ami et al.
patent: 2002/0002560 (2002-01-01), Shah et al.
patent: 2002/0174340 (2002-11-01), Dick et al.
Consilium, “White Paper: Overall Equipment Effectiveness,” http://www.consilium.com/white—oee.html, 1998-2000, 12 pages, Consilium, Inc.
GW Associates, Inc., “GWconX300 Communications Software for 300mm Equipment Data Sheet,” 2001, 3 pages, USA.
GW Associates, Inc., “SDR SECS Driver Software,” http://www.gwainc.com/products/sdr.htm, 6 pages.
IPC, “MyFab2k.com,” http://www.ipc-kallenz.de/, 3 pages.
Prof. Dr.-Ing. K. Etschberger, “Controller Area Network—Introduction,” http://www.ixxat.de/english/knowhow/literatur/can.shtml, 2000, 10 pages, IXXAT Automation GmbH.
J. Moyne, N. Najafi, D. Judd, and A. Stock, “Analysis of Sensor/Actuator Bus Interoperability Standard Alternatives for Semiconductor Manufacturing,” Published in Sensors Expo Conference Proceedings, Sep. 1994, 13 pages.
“MyFab2k-tour,” http://www.ipc-kallmuenz.de/tour1.htm, 6 pages.
SEMI E37-0298, “High-Speed SECS Message Services (HSMS) Generic Services,” 1995/1998, 24 pages, Semiconductor Equipment and Materials International (SEMI).
SEMI E4-0699, “SEMI Equipment Communications Standard 1 Message Transfer (SECS-I),” 1980/1999, 20 pages, Semiconductor Equipment and Materials International (SEMI).
SEMI E5-0600, “SEMI Equipment Communications Standard 2 Message Content (SECS-II),” 1982/2000, pp. 1-15, 92-93, Semiconductor Equipment and Materials International (SEMI).
SEMI E54-0997, “Sensor/Actuator Network Standard,” 1997, 10 pages, Semiconductor Equipment and Materials International (SEMI).
SI Automation, “The SECS Pack—Product Summary/The Silverbox—Product Summary,” http://www.siautomation.com/index1.html, 2000, 4 pages.
P. Singer, “E-Diagnostics: Monitoring Tool Performance,” Cahners Semiconductor International, http://www.semiconductor.net/semiconductor/issues/issues/2001/200103/six010301supp.asp, 2001, 9 pages.
Symphony Systems, “Symphony Systems Effective Productivity Solutions (EPS),” http://www.symphony-systems.com/products/, 10 pages.
Lev-Ami Uzi
Reich Yossef Ilan
Avellino Joseph E.
Beffel, Jr. Ernest J.
Haynes Beffel & Wolfeld LLP
MKS Instruments Inc.
Wiley David
LandOfFree
Method and apparatus for monitoring host to tool communications does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for monitoring host to tool communications, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for monitoring host to tool communications will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3792868