Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1998-06-19
1999-09-28
Nguyen, Kiet T.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
250251, H01J 37317
Patent
active
059593059
ABSTRACT:
A charge neutralization monitor monitors the operation of a charge neutralization system for an ion implantation system. The charge neutralization system produces neutralizing electrons in a region through which an ion beam passes in treating one or more workpieces. The charge neutralization monitor applies a suitable voltage to a target electrode positioned to collect neutralizing electrons produced by the charge neutralization system. The charge neutralization monitor then determines the available neutralizing electron current that may be produced by the charge neutralization system by monitoring the current flowing through the target electrode.
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Fish David J.
Lustiber Paul E.
Mack Michael E.
Pharand Michel
Eaton Corporation
Nguyen Kiet T.
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