Method and apparatus for monitoring a material processing...

Details Method and apparatus for monitoring a material processing... Method and apparatus for monitoring a material processing...

2005-05-24

2005-05-24

Wachsman, Hal (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Remote supervisory monitoring

C702S130000, C702S127000, C156S345240, C438S014000

Reexamination Certificate

active

06898558

ABSTRACT:
The present invention presents an apparatus and method for monitoring a material processing system, wherein the material processing system includes a processing tool, a number of RF-responsive process sensors coupled to the processing tool to generate and transmit process data, and a sensor interface assembly (SIA) configured to receive the process data from the plurality of RF-responsive process sensors.

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