Method and apparatus for modifying surface material

Details Method and apparatus for modifying surface material Method and apparatus for modifying surface material

1997-07-28

2000-08-29

Utech, Benjamin

Coating processes

With post-treatment of coating or coating material

Heating or drying

427377, 4274432, B05D 302

Patent

active

061105341

ABSTRACT:
A method and an apparatus for modifying a surface layer formed on the surface of a base material in order to modify the characteristics of the surface layer such as to control the chemical composition of the surface layer and to develop a novel utilization of ultra-pure water.
The method includes the step of contacting a surface layer on a base material with ultra-pure water in an oxygen-free atmosphere. The amount of dissolved oxygen in the water is preferably 1 ppm or below, and the ultra-pure water is preferably boiled.
The apparatus includes a chamber having inert gas introduction means for introducing an inert gas thereinto, and inert gas discharge means for discharging the inert gas therefrom, a container disposed inside the chamber for holding ultra-pure water, and heating means disposed in the chamber for heating ultra-pure water held in the ultra-pure water container.

REFERENCES:
patent: 5051134 (1991-09-01), Schnegg et al.
patent: 5092937 (1992-03-01), Oguno et al.
patent: 5160429 (1992-11-01), Ohmi et al.

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