Coating processes – Medical or dental purpose product; parts; subcombinations;...
Reexamination Certificate
2007-07-24
2007-07-24
Tsoy, Elena (Department: 1762)
Coating processes
Medical or dental purpose product; parts; subcombinations;...
C427S002110, C427S002130, C427S154000, C427S301000, C427S331000, C427S333000, C427S337000, C427S372200, C427S384000, C427S389700, C427S407100, C427S414000
Reexamination Certificate
active
10322280
ABSTRACT:
The invention provides a method and apparatus for micro array fabrication exclusive from the impact of a gas. A housing with a gas free chamber provides for improved micro array fabrication with a lower defect rate. The invention provides a housing that excludes a gas such as ozone to prevent interaction with probe construction or attachment. A method of fabricating a micro array in an ozone free environment is also disclosed.
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Leproust Eric M.
Perbost Michel G M
Reddy Lalitha
Agilent Technologie,s Inc.
Tsoy Elena
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