Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate
2006-08-15
2006-08-15
Tang, Minh N. (Department: 2829)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
C324S754120, C073S514260
Reexamination Certificate
active
07091715
ABSTRACT:
Method and apparatus for sensing the displacements of micromachined devices and sensors. The method is referred to as the enhanced modulated integrative differential optical sensing (EMIDOS). The target micromachined proof-mass, for which displacements are measured, includes a grid of slits. The micromachined device is bonded to a CMOS chip containing a matching photodiodes array and their readout electronics. The grid is aligned with the photociiodes. An illumination source, such as an LED, is then mounted above the micromachined device. A model for the noise equivalent displacement (NED), including mechanical, electrical and optical domains, as well as all noise sources is derived. The model predicts that displacements below 10−3[√{square root over ( )}Hz] can be measured. The design comprises innovative inertial sensors, an accelerometer and a rategyroscope employing the EMIDOS. Performance models for the noise equivalent acceleration (NEA) and noise equivalent rate (NER) are also derived. The models show that an accelerometer with a very low NEA can be realized.
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Degani Ofir
Nemirovsky Yael
Seter Dan
Socher Eran
Langer, Pat. Atty Edward
Rafael - Armament Development Authority Ltd.
Shiboleth Yisraeli Roberts Zisman & Co.
Tang Minh N.
Technion Research & Development Foundation Ltd.
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