Method and apparatus for metering a feed of hydrogen fluoride va

Details Method and apparatus for metering a feed of hydrogen fluoride va Method and apparatus for metering a feed of hydrogen fluoride va

1981-09-17

1983-08-16

Yuen, Henry C.

Liquid heaters and vaporizers

Indirectly heated separate injected fluid

Submerged flame

122 32, 122 33, F22B 102

Patent

active

043985033

ABSTRACT:
A boiler for vaporizing liquid hydrogen fluoride has a heat transfer surface arranged to be covered increasingly by the liquid as the liquid level rises so that the heat supplied to the boiler can be adjusted to maintain a constant level of liquid in the boiler and thereby equate the feed rate of liquid hydrogen fluoride to that vaporized. Thus by metering and controlling the feed rate of the liquid the feed rate of the vapor can be metered and controlled.

REFERENCES:
patent: 1681305 (1928-08-01), Moneuse
patent: 2007426 (1935-07-01), Harris
patent: 2904014 (1959-09-01), Meyers
patent: 3237608 (1966-03-01), Brandl
patent: 3249303 (1966-05-01), Townsend
patent: 3712073 (1973-01-01), Arenson
patent: 3967591 (1976-07-01), Iida
patent: 4148281 (1979-04-01), Stoll et al.
patent: 4163371 (1979-08-01), Groninger
patent: 4272964 (1981-06-01), Kumagai

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