Method and apparatus for melt level detection in czochralski cry

Details Method and apparatus for melt level detection in czochralski cry Method and apparatus for melt level detection in czochralski cry

1991-09-20

1994-02-15

Chaudhuri, Olik

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including specific material of construction

156601, 1566164, 1566171, C30B 1528

Patent

active

052864618

ABSTRACT:
The present invention is directed toward a melt level detection system for detecting the level of the melt surface in crystal growing systems that utilize a crucible containing a pool of melt from which a seed is withdrawn to grow the crystal. The detection system utilizes a light source for directing a light beam at the melt, and a light detection apparatus positioned on the other side of the melt for receiving the beam of light that is reflected off of the melt. The detection system utilizes a single element linear detector that provides output signals relating to whether the light beam is illuminating the detector, and where on the detector the illumination occurs. A computer system is utilized to implement an algorithm that processes the output signals from the detector which are continually sampled over time. The algorithm disregards the location data sent from the detector if it determines that the light beam was not incident on the detector for a given sample. By analyzing location data only for samples generated when the light beam was incident on the detector, the algorithm determines an average location of the melt level for a predetermined number of samples and assumes that this average is representative of the location of the actual melt level.

REFERENCES:
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patent: 3740563 (1973-06-01), Reichard
patent: 3958129 (1976-05-01), Chernent et al.
patent: 4508970 (1985-04-01), Ackerman
patent: 4915775 (1990-04-01), Katsuoka et al.
patent: 4926357 (1990-05-01), Katsuoka et al.
patent: 5089238 (1992-02-01), Araki et al.

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