Method and apparatus for measuring two dimensional plane displac

Details Method and apparatus for measuring two dimensional plane displac Method and apparatus for measuring two dimensional plane displac

1994-05-17

1995-10-17

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

250237G, G01B 1100

Patent

active

054595789

ABSTRACT:
The present invention provides an apparatus and method for measuring two- dimensional displacement by moire fringes of concentric circle gratings which two-dimensional displacement can be precisely measured by a pair of grating and the measurement resolution can be improved by the image processing using the characteristics of moire fringes without noises.

REFERENCES:
patent: 3689162 (1972-09-01), Ferguson

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