Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1987-01-28
1988-05-31
Karlsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158D, 324 73R, G01N 23225, G01R 3128
Patent
active
047484071
ABSTRACT:
To measure high frequency signal curves at nodes and interconnections of integrated circuits and achieve a good chronological resolution in accordance with the sampling method, extremely short primary electron pulses are used. For such extremely short pulse widths obtainable with beam blanking systems, only individual statistically appearing secondary electrons are registered per pulse, these electrons generating current pulses having different amplitudes and different time behaviors at the output of an energy analyzer. It is proposed that the number of current pulses occurring at the output of the energy analyzer within a prescribed time interval be identified and the quotient, or ratio, thereof, be kept constant with the assistance of a feedback circuit for connection to the voltage of a retarding field electrode. The feedback circuit includes a pulse counter, a digital-to-analog converter, and a spectrometer drive.
REFERENCES:
patent: 3694635 (1972-09-01), Hoetzel et al.
patent: 4675602 (1987-06-01), Feuerbaum et al.
H. P. Feuerbaum, "VLSI Testing Using the Electron Probe", Scanning Electrom Microscopy/1979/I, pp. 285-296.
H. P. Feuerbaum, "Electron Beam Testing: Methods and Applications", Scanning, vol. 5, (1983), pp. 14-24.
Brunner Matthias
Schmitt Reinhold
Winkler Dieter
Karlsen Ernest F.
Nguyen Vinh P.
Siemens Aktiengesellschaft
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