Method and apparatus for measuring three-dimensional...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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C324S765010

Reexamination Certificate

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07084649

ABSTRACT:
A method and apparatus are provided that make it possible to speedily measure, and obtain images of, the three-dimensional distribution of electric fields in integrated circuits, using electro-optic sampling. The sampling is performed using a plurality of electric field sensors, each comprising an electro-optic crystal layer, a light-reflecting layer that is in close contact with the electro-optic crystal layer, and a separation layer that is in close contact with the reflection layer, separating the reflection layer from the object to be measured.

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patent: 5991036 (1999-11-01), Frankel
patent: 6011402 (2000-01-01), Kuo et al.
Lo et al; “Proposal for three-dimensional internal field mapping by cw electro-optic probing”; Applied Physics Letters; vol. 50; No. 25; Jun. 22, 1987; pp. 1791-1793.
S. Miyazawa, Advanced Electronics Series, Category I. vol. I-14 Jul. 10, 1995, pp. 96-101, “Electronics Materials, Properites, Devices, Optical Crystals”.

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