Method and apparatus for measuring thickness of thin article

Details Method and apparatus for measuring thickness of thin article Method and apparatus for measuring thickness of thin article

2008-07-22

2008-07-22

Connolly, Patrick (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S482000

Reexamination Certificate

active

11283294

ABSTRACT:
An apparatus (100) for measuring a thickness of a thin article according to an embodiment of the present apparatus is provided. The apparatus includes an optical fiber interferometer (101), a signal processor module (102) and a measuring module (103). The optical fiber interferometer is configured for obtaining an optical distance difference. This optical distance difference is a result of the thickness of the thin article between a first optical path in which the thin article is measured and a second optical path. The signal processor module is configured for converting an optical distance difference into a phase difference and processing the optical distance difference to obtain a linear signal. That linear signal is convertible into a thickness value of the thin article.

REFERENCES:
patent: 5351124 (1994-09-01), Laskoskie et al.
patent: 6137575 (2000-10-01), Sugiyama et al.
patent: 6837109 (2005-01-01), Okuno
patent: 6850079 (2005-02-01), Yamada et al.
patent: 7133137 (2006-11-01), Shimmick
patent: 2003/0090671 (2003-05-01), Takahashi et al.
patent: 2005/0213103 (2005-09-01), Everett et al.
Huang Jian-bui et al., “Review of Phase Generated Carrier Demodulation Techniques for Interferometric Fiber-optic Sensors”, Optical Technique, May 2000, 228 to 231 and 234, vol. 26 No. 3, China.

Affiliated with

Also associated with

Rating

Method and apparatus for measuring thickness of thin article does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for measuring thickness of thin article, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for measuring thickness of thin article will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3918871