Method and apparatus for measuring thickness of thin article

Details Method and apparatus for measuring thickness of thin article Method and apparatus for measuring thickness of thin article

2008-07-22

2008-07-22

Connolly, Patrick (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S482000

Reexamination Certificate

active

07403288

ABSTRACT:
An apparatus (100) for measuring a thickness of a thin article according to an embodiment of the present apparatus is provided. The apparatus includes an optical fiber interferometer (101), a signal processor module (102) and a measuring module (103). The optical fiber interferometer is configured for obtaining an optical distance difference. This optical distance difference is a result of the thickness of the thin article between a first optical path in which the thin article is measured and a second optical path. The signal processor module is configured for converting an optical distance difference into a phase difference and processing the optical distance difference to obtain a linear signal. That linear signal is convertible into a thickness value of the thin article.

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Huang Jian-bui et al., “Review of Phase Generated Carrier Demodulation Techniques for Interferometric Fiber-optic Sensors”, Optical Technique, May 2000, 228 to 231 and 234, vol. 26 No. 3, China.

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