Method and apparatus for measuring thickness and optical...

Details Method and apparatus for measuring thickness and optical... Method and apparatus for measuring thickness and optical...

2007-06-26

2009-02-17

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07492467

ABSTRACT:
Various embodiments include a metrology tool comprising an emitter configured to emit an incident light beam at a production substrate including an ARL, a receiver configured to receive a reflected light beam from the production substrate, a spectrometer configured to determine a digital signal representing an intensity of a wavelength within the reflected light beam, and a processor configured to determine a spectrum of the reflected light beam from the digital signal, select a suppression band based on an expected wavelength representative of a portion of the ARL, and determine a property of the ARL based on a portion of the spectrum in the selected suppression band.

REFERENCES:
patent: 4558012 (1985-12-01), Nygren et al.
patent: 6261665 (2001-07-01), Murata et al.
patent: 6985237 (2006-01-01), Mikkelsen et al.
patent: 7324210 (2008-01-01), De Groot et al.

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