Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specified electrical sensor or system
Reexamination Certificate
2004-12-13
2008-11-04
Noori, Max (Department: 2855)
Measuring and testing
Specimen stress or strain, or testing by stress or strain...
Specified electrical sensor or system
Reexamination Certificate
active
07444880
ABSTRACT:
The present invention relates to the field measuring the mechanical response of micro-electro-mechanical systems. More specifically, the present invention pertains to a method and apparatus that allows the direct control of the load applied to a Micro-Electro-Mechanical System in order to measure the mechanical response. The system comprises a loading sub-system, a displacement measurement sub-system, and an optional observation sub-system.
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Bhattacharya Kaushik
Ravichandran Guruswami
Shilo Doron
Zhang Rongjing
California Institute of Technology
Noori Max
Tope-McKay & Associates
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