Optics: measuring and testing – Crystal or gem examination
Patent
1986-12-02
1988-07-05
Church, Craig E.
Optics: measuring and testing
Crystal or gem examination
356318, 356417, G01N 2184
Patent
active
047550490
ABSTRACT:
A technique for measuring the ion implant dosage involves method and apparatus for directing pulses of coherent radiation from a laser to the surface of a semiconductor that has been subjected to ion implant. The intensity of the third harmonic reflected from the semiconductor is determined and correlated to determine the ion dosage within the semiconductor.
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Bomback John L.
James John V.
Wang Charles C.
Berman Jack I.
Church Craig E.
Ford Motor Company
Godwin Jr. Paul K.
Sadler Clifford L.
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