Method and apparatus for measuring the height of an object

Details Method and apparatus for measuring the height of an object Method and apparatus for measuring the height of an object

1997-12-02

2000-05-30

Font, Frank G.

Optics: measuring and testing

By polarized light examination

With light attenuation

356375, 356377, 356359, 250561, G01B 1124, G01B 1100, G01N 2100

Patent

active

060697016

ABSTRACT:
A method and an apparatus for measuring the height of an apex of an object with high accuracy without influence of the surface state of the object are disclosed. Correlation coefficients of respective positions of a waveform formed from digital data indicative of the height of the object detected by a head portion of a detector and a previously prepared standard waveform are calculated while moving the waveforms in the vertical and horizontal directions and the height of an apex position of the standard waveform at a position having a largest correlation coefficient from the calculated result is decided as the height of the apex of the object. Accordingly, the height of the apex can be decided from the whole detected waveforms without influence of local abnormality of the reflected light quantity waveform due to minute ruggedness or discoloration of the surface of the object.

REFERENCES:
patent: 4971445 (1990-11-01), Sato et al.
patent: 4988202 (1991-01-01), Nayar et al.
patent: 5023916 (1991-06-01), Breu
patent: 5064291 (1991-11-01), Reiser
patent: 5087125 (1992-02-01), Narutaki
patent: 5355221 (1994-10-01), Cohen et al.
patent: 5465152 (1995-11-01), Bilodeau et al.

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