Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1997-09-10
2000-09-12
Kim, Robert H.
Optics: measuring and testing
By particle light scattering
With photocell detection
356432, 356359, G01B 902
Patent
active
061185337
ABSTRACT:
A method and apparatus that determines a concentration of ions implanted in a material is described. The method includes the steps of: 1) generating at least two excitation laser sub-pulses and a probe pulse from a single pulse emitted from a laser; 2) irradiating a region of the material with a grating pattern formed by overlapping at least two excitation laser sub-pulses to initiate a time-dependent response in the region; 3) diffracting a probe laser pulse off the region to generate at least one time-dependent signal beam; 4) detecting at least one time-dependent signal beam to generate a signal waveform; and 5) processing the signal waveform to determine the concentration of ions implanted in the material.
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Banet Matthew J.
Fuchs Martin
Rogers John A.
Active Impulse Systems Inc.
Kim Robert H.
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