Method and apparatus for measuring the capacitance of complement

Details Method and apparatus for measuring the capacitance of complement Method and apparatus for measuring the capacitance of complement

1986-08-01

1989-01-03

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Conductor identification or location

Inaccessible

324158T, G01R 2726

Patent

active

047959649

ABSTRACT:
A combination inverter chain and ring oscillator (200) is used to measure the capacitance of a field effect transistor device (12, 85, 202) by measuring the current associated with propagating a signal through the circuit at a certain signal frequency. Where the device (12) is a CMOS pair, the capacitance thus obtained is reduced by a constant factor to take crowbar current (52) into account. Once the capacitance for a basic or reference device (84) has been determined, the basic structure may be modified to derive incremental per-unit area capacitances for various components of the device structure.

REFERENCES:
patent: 4380707 (1983-04-01), Crisp
Iwai et al., Capacitance Measurement Technique in High Density MOS Structures, 12-1980, pp. 235-238.
Van Beers et al., Automatic Accurate Display of Capacitance-and Conductance-Versus-Bias Characteristics at High Frequencies for Semiconductor Evaluation, 3-1977, pp. 1-5.

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