Method and apparatus for measuring the breakdown voltage of semi

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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324 731, 324158T, G01R 3120

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active

052851516

ABSTRACT:
A ramp voltage is applied through a current limiter 2 to a DUT 3. Setting as a reference time point (t.sub.1) a time when a ramp portion of the response voltage V of the DUT 3 has settled to a prescribed value (for example, when the voltage gradient is reduced by a predetermined rate to the ramp rate RR/2), the measurement is carried out, at time t.sub.2, after a predetermined interval from the reference time t.sub.2. Accordingly, a breakdown voltage is measured before the response voltage V of the DUT 3 is influenced by heat, etc., power consumption is reduced and an excessive stress is not applied to the DUT 3, so that no damage or burning occurs in the DUT 3.

REFERENCES:
patent: 3054954 (1962-09-01), Boscia et al.
patent: 3636450 (1972-01-01), Griffin
patent: 3883805 (1975-05-01), Cohn
patent: 3895297 (1975-07-01), Jarl
patent: 3965420 (1976-06-01), Bennett
patent: 3979672 (1976-09-01), Arnoldi
Hewlett-Packard Company Application Note 356, "-HP 4142B Modular DC Source/Monitor Practical Applications-High Speed DC Characterization of Semiconductor Devices from Sub pA to 1A", Nov. 1987, pp. 5-15 to 5-17.
Hewlett-Packard Company Application Note 356, "-HP 4142B Modular DC Source/Monitor Practical Applications-High Speed DC Characterization of Semiconductor Devices from Sub pA to 1A", Nov. 1987, pp. 5-63 to 5-69.
Hewlett-Packard Company Operation Manual, "HP 4142B Modular DC Source/Monitor", Jun. 1991 p. 5.

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