Method and apparatus for measuring temperature

Details Method and apparatus for measuring temperature Method and apparatus for measuring temperature

2006-04-25

2006-04-25

Gutierrez, Diego (Department: 2859)

Thermal measuring and testing

Temperature measurement

In spaced noncontact relationship to specimen

C374S130000, C374S121000, C374S141000, C117S201000

Reexamination Certificate

active

07033070

ABSTRACT:
Temperature of molten silicon1in an infrared image furnace2including a halogen lamp8as a heating source to grow a single crystal of silicon in a floating-zone method is measured with high precision according to light radiated from the molten silicon1. By disposing an optical path tube extending to the molten silicon1, light propagating from the molten silicon1in a particular direction can be extracted. As a result, light radiated from the molten silicon1can be extracted while reducing the influence of disturbance of light from various directions such as light radiated from the halogen lamp8, reflected light and scattered light thereof, and the like. Luminance of light thus extracted is measured by a CCD camera7to obtain the temperature according to the luminance, and hence the temperature can be measured with high precision using a measuring apparatus of a simple configuration.

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